Diaphragm-Sealed Valves

Our diaphragm-sealed valves are available in a wide variety of sizes, materials, and configurations to fill your needs for high-purity and ultrahigh-purity applications.

Diaphragm-sealed valves:

• Have long cycle life and provide effective shutoff
• Have actuator options including manual, pneumatic, and locking
• Are offered in a wide variety of sizes, materials, and configurations

Diaphragm-Sealed Valves (DL and DS Series)

DL series and DS series diaphragm valves offer packless, all metal containment for high-purity and ultrahigh-purity applications up to 3500 psig (241 bar).

Specifications

Working Pressure	Up to 3500 psig (241 bar)
Temperature	–100 to 250°F (–73 to 121°C)
Flow Coefficient	Up to 0.30
Body Material	316L stainless steel
Diaphragm Material	316 stainless steel
End Connections
Type	Swagelok® tube fitting, VCR® face seal fitting, VCO® O-ring fitting, tube butt weld, tube socket weld
Size	1/4, 3/8, and 1/2 in.; 6 and 8 mm

Bulk Gas Diaphragm Valve (LD Series)

With flow coefficients up to 13 and a variety of body materials and configurations, LD series bulk gas diaphragm valves can support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications.

Specifications

Working Pressure	Up to 300 psig (20.6 bar)
Temperature	–20 to 300° F (–28 to 148°C)
Flow Coefficient	Up to 13
Body Materials	CF3M cast stainless steel, forged and bar stock 316L stainless steel
Diaphragm Material	316L stainless steel
End Connections
Type	Swagelok tube fitting, male VCR face seal fitting, female NPT, female ISO, tube extension
Size	1/4 to 1 in.; 12 to 25 mm

Springless Diaphragm Valves for High Performance (DP Series)

With 316L VIM-VAR construction, DP series diaphragm-sealed valves are suitable for a variety of ultrahigh-purity applications.

Specifications

Working Pressure	Vacuum to 3045 psig (210 bar)
Burst Pressure	Up to 12 200 psig (840 bar)
Actuation Pressure	60 to 120 psig (4.2 to 8.2 bar)
Temperature	–10 to 300°F (–23 to 150°C)
Flow Coefficient	0.20 and 0.27
Body Materials	316L VIM-VAR stainless steel
Diaphragm Material	Cobalt-based superalloy
End Connections
Type	Swagelok tube fitting, VCR face seal fitting, tube butt weld, modular surface-mount (MSM)
Size	1/4 in.; 6 mm

High-Flow, Springless Diaphragm Valves (DF Series)

DF series diaphragm valves are designed for a wide range of ultrahigh-purity, high-flow applications, with a flow coefficient of 0.62 and available with high-flow end connections.

Specifications

Working Pressure	Vacuum to 300 psig (20.6 bar)
Burst Pressure	3200 psig (220 bar)
Actuation Pressure	70 to 100 psig (4.9 to 6.8 bar)
Temperature	–10 to 270°F (–23 to 132°C)
Flow Coefficient	0.62
Body Materials	316L VAR stainless steel
Diaphragm Material	Cobalt-based superalloy
End Connections
Type	"H" type VCR® face seal fitting, VCR face seal fitting, tube butt weld
Size	1/4, 3/8, 1/2 in.; 10 and 12 mm

Diaphragm Valves for Atomic Layer Disposition (ALD Series)

ALD diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.

Specifications

Working Pressure	Vacuum to 145 psig (10.0 bar)
Burst Pressure	>3200 psig (220 bar)
Actuation Pressure	50 to 90 psig (3.5 to 6.2 bar)
Temperature	32 to 392°F (0 to 200°C)
Flow Coefficient	0.27 or 0.62
Body Materials	316L VIM-VAR stainless steel
Diaphragm Material	Cobalt-based superalloy
End Connections
Type	VCR face seal fitting, tube butt weld; modular surface mount (MSM)
Size	1/4 to 1/2 in.; 6 to 12 mm; 1.125 and 1.5 in. MSM

Diaphragm Valves, Ultrahigh-Purity Fluoropolymer (DRP Series)

Meeting SEMI Standard F57-0301 for UHP chemical distribution systems and equipment, the DRP series' ultrahigh-purity diaphragm enhanced design helps minimize entrapment areas and extend diaphragm life.

Specifications

Pressure Rating	Up to 100 psig (6.8 bar)
Media Temperature	73 to 212°F (23 to 100°C)
Flow Coefficient	Up to 10.2
Body, Diaphragm Material	Modified PTFE
End Connections
Type	Fine thread flare and Nippon Pillar Super 300® standard; ISO, NPT, Flowell
Size	1/4 to 1 1/4 in. and 6 to 25 mm
Configuration	2- and 3-way manual and pneumatic shutoff; adjustable flow and bypass models

Thermal-Immersion Diaphragm Valves

Swagelok thermal-immersion diaphragm valves offer high-speed actuation, flow coefficients up to 0.60, and are designed for optimum performance at 220°C (428°F) for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.

Specifications

Working Pressure	Vacuum to 70 psig (4.8 bar)
Burst Pressure	> 3200 psig (220 bar)
Actuation Pressure	60 to 90 psig (4.1 to 6.2 bar)
Temperature	20 to 220°C (70 to 428°F)
Flow Coefficient
"H" type VCR® Connections	0.60 at 20°C (70°F)
	0.40 at 220°C (428°F)
VCR and all other connections	0.30 at 20°C (70°F) 0.21 at 220°C (428°F)
Modular surface-mount body	0.25 at 20°C (70°F) 0.21 at 220°C (428°F)
Body Material	316L VIM-VAR stainless steel
Diaphragm Material	Cobalt-based superalloy
End Connections
Type	VCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM)
Size	1/4 and 3/8 in. 1.125 and 1.5 in. MSM

Radial Diaphragm Valves (DR Series)

The DR series radial diaphragm valve offers a cleaner, more compact way to manage sterile flow streams for many applications: media preparation, fermentation, harvest, separation, refining, purification, CIP, and SIP systems. The single-body biopharm valve design can be manufactured in a wide range of configurations to include multiple valves and multiple ports, and point-of-use valves.

Specifications

Working Pressure	Up to 150 psig (10.3 bar)
Media Temperature	Up to 280°F (137°C)
Flow Coefficient	1.6 to 27.2
Body Material	316L stainless steel
Diaphragm Material	Modified PTFE
Internal Surface Finish	Electropolished and finished to 15 µin. (0.38 µm) avg
Valve Sizes	1/2 to 2 in.
End Connections	Tube butt weld, TS series sanitary clamp, and Kwik-Clamp

Springless Diaphragm Valves, 1.125 in., for Modular Gas Systems (DE Series)

DE series springless diaphragm valves are available with a variety of actuation options for ease of integration into your 1.125 in. C-seal or W-seal modular gas system.

Specifications

Working Pressure	Vacuum to 125 psig (8.6 bar)
Burst Pressure	>3200 psig (220 bar)
Actuation Pressure
Normally Closed	60 to 120 psig (4.1 to 8.2 bar)
Normally Open and	60 to 90 psig (4.1 to 6.2 bar)
Normally Closed with manual
Integral lockout override
Temperature	14 to 150°F (-10 to 65°C)
Flow Coefficient	0.3
Body Materials	316L VIM-VAR stainless steel
Diaphragm Material	Cobalt-based superalloy
End Connections
Type	1.125 in. modular surface mount (MSM)
Configurations	2-port and 3-port